@inproceedings{602be8d8e10e4921b529df167db424a9,
title = "Mode-I fracture toughness of tetrahedral amorphous diamond-like carbon (ta-C) MEMS",
abstract = "Mode-I fracture toughness studies were conducted on hydrogen-free tetrahedral amorphous diamond-like carbon (ta-C) MEMS specimens of various thicknesses. Mathematically sharp edge pre-cracks were generated through micro indentation on the Silicon dioxide sacrificial layer, An atomic force microscope (AFM) was employed to measure the precise length and orientation of each pre-crack. Upon wet etching and release the freestanding uniform width and varying thickness MEMS-scale specimens were tested in Mode-I using a cusiom-made micro-tensile tester, Fracture toughness values were computed from the test data using linear elastic fracture mechanics (LEFM) for a finite width specimen with an edge crack in the fixed grip loading configuration, The average Mode-I fracture toughness for 0,5 micron thick specimens was found to be 4.25±0.7 MPa√m while the average mode-I fracture toughness for 1 micron specimens was 4.4±0.4 MPa√m.",
author = "K. Jonnalagadda and Cho, {S. W.} and I. Chasiotis and Friedmann, {T. A.} and Sullivan, {J. P.}",
year = "2004",
month = dec,
day = "1",
language = "English (US)",
isbn = "1558998063",
series = "Materials Research Society Symposium Proceedings",
pages = "202--207",
booktitle = "Stability of Thin Films and Nanostructures",
note = "2004 MRS Fall Meeting ; Conference date: 28-11-2004 Through 03-12-2004",
}