Mixed-mode I/II stress intensity factors were obtained from experiments conducted on tetrahedral amorphous diamond-like carbon (ta-C) MEMS-scale specimens. The thin film ta-C specimens contained sharp edge precracks that were generated using microindentation. The crack angle varied in the range of 7°-32° resulting in varying mode mixity (K II/K I) at the crack tip. The microscale freestanding fracture specimens were loaded in uniaxial tension and the load at failure was measured and used to calculate the mixed-mode I/II stress intensity factors, K I and K II, by a finite element solution. For the limited range of pre-crack angles employed here, the resulting stress intensity factor values were comparable to those obtained for brittle materials tested at the macro scale using similar specimen geometries.