Mixed mode fracture in brittle materials for MEMS

Krishna Jonnalagadda; Ioannis Chasiotis; Thomas Friedmann

doi:10.1115/IMECE2006-13832

Mixed mode fracture in brittle materials for MEMS

Krishna Jonnalagadda, Ioannis Chasiotis, Thomas Friedmann

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Planar defects such as cracks are rarely normal to the loading direction. To investigate the case of arbitrarily oriented cracks mixed mode I/II fracture experiments were conducted on amorphous diamond-like carbon (ta-C) thin films. The mixed mode I/II loading at the crack tip was obtained using oblique edge pre-cracks in uniform gage finite width tensile specimens. The pre-cracks were generated using microindentation in 1μm thick micro-tensile specimens. Uniaxial tensile tests were performed to measure the applied far-field stress at failure and a numerical solution was used to extract the stress intensity factor values. The results were compared against the maximum tensile stress (MTS) and maximum energy release rate (MERR) criteria for mixed mode fracture and the data showed good agreement.

Original language	English (US)
Title of host publication	Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Print)	0791837904, 9780791837900
DOIs	https://doi.org/10.1115/IMECE2006-13832
State	Published - Jan 1 2006
Event	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL, United States Duration: Nov 5 2006 → Nov 10 2006

Publication series

Name	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
ISSN (Print)	1096-665X

Other

Other	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
Country	United States
City	Chicago, IL
Period	11/5/06 → 11/10/06

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1115/IMECE2006-13832

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Jonnalagadda, K., Chasiotis, I., & Friedmann, T. (2006). Mixed mode fracture in brittle materials for MEMS. In Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2006-13832

Mixed mode fracture in brittle materials for MEMS. / Jonnalagadda, Krishna; Chasiotis, Ioannis; Friedmann, Thomas.

Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2006. (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jonnalagadda, K, Chasiotis, I & Friedmann, T 2006, Mixed mode fracture in brittle materials for MEMS. in Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems. American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, American Society of Mechanical Engineers (ASME), 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006, Chicago, IL, United States, 11/5/06. https://doi.org/10.1115/IMECE2006-13832

Jonnalagadda K, Chasiotis I, Friedmann T. Mixed mode fracture in brittle materials for MEMS. In Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems. American Society of Mechanical Engineers (ASME). 2006. (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS). https://doi.org/10.1115/IMECE2006-13832

Jonnalagadda, Krishna ; Chasiotis, Ioannis ; Friedmann, Thomas. / Mixed mode fracture in brittle materials for MEMS. Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2006. (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS).

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