Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

Wen Huang, Xin Yu, Tom Comberiate, Cheng Wei Qiu, Jose E. Schutt-Aine, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube'. Together they form a unique fingerprint.