Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

Wen Huang, Xin Yu, Tom Comberiate, Cheng Wei Qiu, Jose E Schutt-Aine, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication71st Device Research Conference, DRC 2013 - Conference Digest
Pages227-228
Number of pages2
DOIs
StatePublished - Dec 16 2013
Event71st Device Research Conference, DRC 2013 - Notre Dame, IN, United States
Duration: Jun 23 2013Jun 26 2013

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other71st Device Research Conference, DRC 2013
CountryUnited States
CityNotre Dame, IN
Period6/23/136/26/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Huang, W., Yu, X., Comberiate, T., Qiu, C. W., Schutt-Aine, J. E., & Li, X. (2013). Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube. In 71st Device Research Conference, DRC 2013 - Conference Digest (pp. 227-228). [6633876] (Device Research Conference - Conference Digest, DRC). https://doi.org/10.1109/DRC.2013.6633876