Miniaturized on-chip passive devices based on self-rolled-up SiN x nanomembrane inductive tube

Wen Huang, Xin Yu, Tom Comberiate, Cheng Wei Qiu, Jose E Schutt-Aine, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publication71st Device Research Conference, DRC 2013 - Conference Digest
Pages227-228
Number of pages2
DOIs
StatePublished - Dec 16 2013
Event71st Device Research Conference, DRC 2013 - Notre Dame, IN, United States
Duration: Jun 23 2013Jun 26 2013

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other71st Device Research Conference, DRC 2013
CountryUnited States
CityNotre Dame, IN
Period6/23/136/26/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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