Abstract
We present a new Micro Electro Mechanical device that can apply a compressive or a tensile force on the order of a milli Newton quasi-statically by electrically actuating a set of comb capacitors. The same capacitors can be used to sense the displacement of the device by recording the change of capacitance. The device is fabricated using the SCREAM (Single Crystal Reactive Etching and Metallization) process developed at Cornell. The functionality of the device is demonstrated by compressing two slender bars and buckling them. The buckling experiment is then used to calibrate the load generated by the device. The device has potential use in material characterization under a wide range of environmental conditions.
| Original language | English (US) |
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| Pages | 60-63 |
| Number of pages | 4 |
| State | Published - 1995 |
| Externally published | Yes |
| Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: Jun 25 1995 → Jun 29 1995 |
Other
| Other | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
|---|---|
| City | Stockholm, Sweden |
| Period | 6/25/95 → 6/29/95 |
ASJC Scopus subject areas
- General Engineering