TY - GEN
T1 - Mid-infrared thermomechanical sensitivity of microcantilevers for application to infrared spectroscopy
AU - Kwon, Beomjin
AU - King, William P.
AU - Schulmerich, Matthew
AU - Bhargava, Rohit
PY - 2010
Y1 - 2010
N2 - We report the use of bimaterial microcantilever sensors for sensing narrow-band infrared (IR) radiation generated by a monochromator and its application to IR spectroscopy of polymer films. We selected microcantilever sensors of either silicon or silicon nitride and having a thin metal film coating. To assess the IR measurement capability of these cantilevers, the IR sensitivity to noise ratio (SNR), was measured in the mid-IR fingerprint spectral region (5 - 10 μ m or 1000 - 2000 cm-1). The measured SNR was in the range of 8 - 90. We further demonstrated the utility of these sensors by using them to collect an IR absorbance spectrum of 1 μm thick polycarbonate film. The characteristic IR peaks for this film could be seen, and compare well with conventional Fourier Transform IR (FT-IR) data. The spectral resolution of the cantilever sensors determined to be in the range 32 - 64 cm-1.
AB - We report the use of bimaterial microcantilever sensors for sensing narrow-band infrared (IR) radiation generated by a monochromator and its application to IR spectroscopy of polymer films. We selected microcantilever sensors of either silicon or silicon nitride and having a thin metal film coating. To assess the IR measurement capability of these cantilevers, the IR sensitivity to noise ratio (SNR), was measured in the mid-IR fingerprint spectral region (5 - 10 μ m or 1000 - 2000 cm-1). The measured SNR was in the range of 8 - 90. We further demonstrated the utility of these sensors by using them to collect an IR absorbance spectrum of 1 μm thick polycarbonate film. The characteristic IR peaks for this film could be seen, and compare well with conventional Fourier Transform IR (FT-IR) data. The spectral resolution of the cantilever sensors determined to be in the range 32 - 64 cm-1.
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U2 - 10.1109/ICSENS.2010.5691004
DO - 10.1109/ICSENS.2010.5691004
M3 - Conference contribution
AN - SCOPUS:79951918989
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 2405
EP - 2408
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -