Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates

Erik Sunden, Jack K. Moon, C. P. Wong, William P. King, Samuel Graham

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents a low pressure hot embossing method for transferring patterns of vertically aligned carbon nanotubes into thermoplastic substrates. The procedure utilizes the synthesis of carbon nanotubes in discrete patterns on silicon substrates through the vapor liquid solid growth mechanism. The nanotube pattern and silicon stamp is placed on top of a polycarbonate film and locally heated above the glass transition temperature using microwave processing. The weight of the silicon substrate presses the nanotubes into the polycarbonate, resulting in the complete transfer of vertically aligned patterns. The technique is a rapid processing method, which could be used to integrate aligned nanomaterials with MEMS and flexible electronics that are fabricated on a wide range of thermoplastic polymer materials.

Original languageEnglish (US)
Pages (from-to)1947-1950
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number4
DOIs
StatePublished - Jul 2006
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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