Microthermogravimetry using a microcantilever hot plate with integrated temperature-compensated piezoresistive strain sensors

Jungchul Lee, William Paul King

Research output: Contribution to journalArticlepeer-review

Abstract

This paper reports thermogravimetric analysis of nanogram samples of paraffin using a microcantilever hot plate. The microcantilever hot plate has an integrated temperature-controlled heater and integrated temperature-compensated strain-sensing piezoresistors. The microcantilever vibration amplitude was measured using either a laser and a position sensitive photodiode, or using the piezoresistors. The cantilever resonance was measured as the cantilever was heated, such that the analyte mass could be measured as a function of temperature. Both optical and piezoresistive methods were employed to generate thermogravimetric curves for analytes in the range of 1-3 ng, and the results of the two methods compared well.

Original languageEnglish (US)
Article number054901
JournalReview of Scientific Instruments
Volume79
Issue number5
DOIs
StatePublished - Jun 9 2008

ASJC Scopus subject areas

  • Instrumentation

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