Abstract
This paper reports a novel method for manufacturing three-dimensional microstructures that can contain buried microchannels, freely standing structures, and/or be fully released from a substrate. The method involves embossing photodefinable thermally sacrificial polymers that are subsequently overcoated with another permanent structural material (e.g. glasses, polymer, etc.) and then decomposed by heating at elevated temperatures. This heating step results in the decomposition of the sacrificial material into gaseous products, thus opening or releasing the desired structures. This paper discusses such a process using a negative tone photosensitive polynorbornene sacrificial polymer and deomstrates the fabrication of a microfluidic device using the method.
| Original language | English (US) |
|---|---|
| Article number | M2.8 |
| Pages (from-to) | 17-20 |
| Number of pages | 4 |
| Journal | Materials Research Society Symposium Proceedings |
| Volume | EXS |
| Issue number | 2 |
| State | Published - 2004 |
| Externally published | Yes |
| Event | 2003 MRS Fall Meeting - Boston, MA, United States Duration: Dec 1 2003 → Dec 5 2003 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering