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Microscale materials testing using MEMS actuators
M. A. Haque,
M. T.A. Saif
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
Research output
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peer-review
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Keyphrases
Actuator
20%
Bending Experiment
40%
Bending Test
20%
Bending Testing
20%
Cantilever Bending
40%
Comb-drive Actuator
20%
Displacement Measurement
20%
Environmental Conditions
20%
Fabrication Methods
20%
Force Measurement
20%
In Situ Observation
20%
Material Behavior
20%
Material Testing
100%
Materials Research
20%
MEMS Actuator
100%
Micromaterials
100%
Micromechanical Testing
20%
Multilayer Thin Films
20%
Size Scaling
20%
Spring Constant
20%
Sub-micrometer
20%
Tensile Bending
20%
Tensile Force
20%
Tensile Test
60%
Testing Method
20%
Uniaxial Tensile
20%
Uniaxial Tension Test
20%
Engineering
Bending Tests
20%
Comb Drive Actuator
20%
Displacement Measurement
20%
Experimental Result
20%
High Resolution
20%
Material Behavior
20%
Microelectromechanical System
100%
Microscale
100%
Situ Observation
20%
Small Size Scale
20%
Spring Constant
20%
Tensile Force
20%
Tensile Testing
40%
Tensiles
40%
Tested Specimen
20%
Thin Films
20%
Material Science
Actuator
100%
Aluminum
28%
Material Testing
100%
Microelectromechanical System
100%
Scanning Electron Microscopy
14%
Tensile Testing
42%
Thin Films
14%