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Microscale materials testing using MEMS actuators
M. A. Haque,
M. T.A. Saif
Mechanical Science and Engineering
Bioengineering
Beckman Institute for Advanced Science and Technology
Carl R. Woese Institute for Genomic Biology
Biomedical and Translational Sciences
Center for South Asian and Middle Eastern Studies
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peer-review
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Keyphrases
Material Testing
100%
MEMS Actuator
100%
Micromaterials
100%
Tensile Test
60%
Cantilever Bending
40%
Bending Experiment
40%
Fabrication Methods
20%
Force Measurement
20%
Environmental Conditions
20%
Multilayer Thin Films
20%
Tensile Force
20%
Uniaxial Tension Test
20%
Sub-micrometer
20%
Actuator
20%
Spring Constant
20%
Material Behavior
20%
In Situ Observation
20%
Bending Test
20%
Size Scaling
20%
Displacement Measurement
20%
Testing Method
20%
Materials Research
20%
Uniaxial Tensile
20%
Tensile Bending
20%
Comb-drive Actuator
20%
Bending Testing
20%
Micromechanical Testing
20%
Engineering
Microscale
100%
Microelectromechanical System
100%
Tensile Testing
40%
Tensiles
40%
High Resolution
20%
Thin Films
20%
Experimental Result
20%
Tensile Force
20%
Material Behavior
20%
Displacement Measurement
20%
Spring Constant
20%
Bending Tests
20%
Situ Observation
20%
Small Size Scale
20%
Tested Specimen
20%
Comb Drive Actuator
20%
Material Science
Microelectromechanical System
100%
Actuator
100%
Material Testing
100%
Tensile Testing
42%
Aluminum
28%
Thin Films
14%
Scanning Electron Microscopy
14%