Microplasma jets generated by arrays of microchannels fabricated in flexible molded plastic

J. H. Ma; D. C. Shih; S. J. Park; J. G. Eden

doi:10.1109/TPS.2011.2165564

Microplasma jets generated by arrays of microchannels fabricated in flexible molded plastic

J. H. Ma, D. C. Shih, S. J. Park, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5μ m and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ∼ 3.6 mm into laboratory air for a He gas flow rate of ∼ 4.6 standard liters per minute.

Original language	English (US)
Article number	6035795
Pages (from-to)	2700-2701
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	39
Issue number	11 PART 1
DOIs	https://doi.org/10.1109/TPS.2011.2165564
State	Published - Nov 2011

Keywords

Atmospheric pressure
microplasmas
optical spectroscopy
plasma jets

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

Online availability

10.1109/TPS.2011.2165564

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title = "Microplasma jets generated by arrays of microchannels fabricated in flexible molded plastic",

abstract = "Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5μ m and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ∼ 3.6 mm into laboratory air for a He gas flow rate of ∼ 4.6 standard liters per minute.",

keywords = "Atmospheric pressure, microplasmas, optical spectroscopy, plasma jets",

author = "Ma, {J. H.} and Shih, {D. C.} and Park, {S. J.} and Eden, {J. G.}",

note = "Funding Information: Manuscript received December 9, 2010; revised March 28, 2011; accepted March 29, 2011. Date of publication October 6, 2011; date of current version November 9, 2011. This work was supported by AFOSR. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165564",

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AU - Ma, J. H.

AU - Shih, D. C.

AU - Park, S. J.

AU - Eden, J. G.

N1 - Funding Information: Manuscript received December 9, 2010; revised March 28, 2011; accepted March 29, 2011. Date of publication October 6, 2011; date of current version November 9, 2011. This work was supported by AFOSR. The authors are with the Laboratory for Optical Physics and Engineering, Department of Electrical and Computer Engineering, University of Illinois, Urbana, IL 61801 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2011.2165564

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N2 - Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5μ m and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ∼ 3.6 mm into laboratory air for a He gas flow rate of ∼ 4.6 standard liters per minute.

AB - Novel microplasma jet devices have been fabricated in a moldable polymer that is resilient, transparent, and flexible. With a layer-by-layer assembly process involving a mold and initially undercured polymer, arrays of plasma microjets as large as 5 × 2 have been constructed and demonstrated to date. Having a channel diameter of 340 ± 5μ m and a single gas feed 4 mm in diameter for the entire array, the microchannel jets extend ∼ 3.6 mm into laboratory air for a He gas flow rate of ∼ 4.6 standard liters per minute.

KW - Atmospheric pressure

KW - microplasmas

KW - optical spectroscopy

KW - plasma jets

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Microplasma jets generated by arrays of microchannels fabricated in flexible molded plastic

Abstract

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ASJC Scopus subject areas

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