Abstract
A micromotion amplifier has been designed and characterized. Large displacements are produced when long beams are buckled by an axial loading actuator motion of 1-2 μm. This buckling amplifiers the small displacement and generates motions on the order of 100 μm. The displacement is stabilized by proper choice of asymmetry in the buckling beams. Devices based on this method have been designed, fabricated and successfully tested to have substantial displacements. Theoretical modeling and Finite Element Method (FEM) analysis predicted the relation between the loading actuator motion and the amplified motion.
Original language | English (US) |
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Pages | 424-428 |
Number of pages | 5 |
State | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems - San Diego, CA, USA Duration: Feb 11 1996 → Feb 15 1996 |
Other
Other | Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems |
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City | San Diego, CA, USA |
Period | 2/11/96 → 2/15/96 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering