Micromotion amplifier

X. T. Huang, M. T. Saif, N. C. MacDonald

Research output: Contribution to conferencePaperpeer-review

Abstract

A micromotion amplifier has been designed and characterized. Large displacements are produced when long beams are buckled by an axial loading actuator motion of 1-2 μm. This buckling amplifiers the small displacement and generates motions on the order of 100 μm. The displacement is stabilized by proper choice of asymmetry in the buckling beams. Devices based on this method have been designed, fabricated and successfully tested to have substantial displacements. Theoretical modeling and Finite Element Method (FEM) analysis predicted the relation between the loading actuator motion and the amplified motion.

Original languageEnglish (US)
Pages424-428
Number of pages5
StatePublished - Jan 1 1996
Externally publishedYes
EventProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems - San Diego, CA, USA
Duration: Feb 11 1996Feb 15 1996

Other

OtherProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems
CitySan Diego, CA, USA
Period2/11/962/15/96

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Micromotion amplifier'. Together they form a unique fingerprint.

Cite this