Micromechanical devices with controllable stiffness fabricated from regular 3D porous materials

Hierarchical pore structures can dramatically change the mechanical properties of materials, but current methods for creating porous materials make the mechanical properties difficult to engineer. Here we present template based techniques for making three-dimensional (3D) regular macroporous microcantilevers with Young's moduli that can vary from 2.0 to 44.3 GPa. The Young's moduli can be tuned by controlling the porosity and the deformation mode, which is dependent on the pore structure. The template technique allows 3D spatial control of the ordered porous structure and the ability to use a broad set of materials, demonstrated with nickel and alumina microcantilevers.