Micromachined artificial haircell

Jonathan Engel; Nannan I Chen; Jack Chen; Chang Liu

Micromachined artificial haircell

Jonathan Engel (Inventor), Nannan I Chen (Inventor), Jack Chen (Inventor), Chang Liu (Inventor)

Research output: Patent

Abstract

A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

Original language	English (US)
U.S. patent number	7661319
Filing date	6/1/07
State	Published - Feb 16 2010

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@misc{3920003a1bfd4289b891f9f9bd8a67ec,

title = "Micromachined artificial haircell",

abstract = "A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.",

author = "Jonathan Engel and Chen, {Nannan I} and Jack Chen and Chang Liu",

note = "STATEMENT OF GOVERNMENT INTEREST This invention was made with Government assistance under USAF/AFOSR Contract No. F49620-02-2-0496, NASA Contract No. NAG5-8781 and NSF Contract No. IIS0080639, IIS99-84954. The Government has certain rights in this invention.; 7661319",

year = "2010",

month = feb,

day = "16",

language = "English (US)",

type = "Patent",

}

TY - PAT

T1 - Micromachined artificial haircell

AU - Engel, Jonathan

AU - Chen, Nannan I

AU - Chen, Jack

AU - Liu, Chang

N1 - STATEMENT OF GOVERNMENT INTEREST This invention was made with Government assistance under USAF/AFOSR Contract No. F49620-02-2-0496, NASA Contract No. NAG5-8781 and NSF Contract No. IIS0080639, IIS99-84954. The Government has certain rights in this invention.

PY - 2010/2/16

Y1 - 2010/2/16

N2 - A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

AB - A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.

M3 - Patent

M1 - 7661319

Y2 - 2007/06/01

ER -

Micromachined artificial haircell

Abstract

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