Micromachined artificial haircell

Jonathan Engel (Inventor), Nannan I Chen (Inventor), Jack Chen (Inventor), Chang Liu (Inventor)

Research output: Patent


A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.
Original languageEnglish (US)
U.S. patent number7661319
Filing date6/1/07
StatePublished - Feb 16 2010


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