TY - JOUR
T1 - Microinstruments for submicron material studies
AU - Saif, M. T.A.
AU - MacDonald, N. C.
N1 - Funding Information:
The work was supported by DARPA and the National Science Foundation. The computing resources of Materials Science Center, Cornell University, were used to carry out this research. We also thank Mr. Wang Yan of Electrical Engineering, Cornell University, for his assistance in fabricating the tension instrument.
PY - 1998/12
Y1 - 1998/12
N2 - We present two microinstruments for submicron scale material characterization. One of the instruments applies torsion on two single crystal silicon bars with square cross sections, 1 and 2.25 μm2, until fracture. The maximum shear stress prior to fracture is found to be 5.6 and 2.6 GPa, respectively. The second instrument applies tension on a composite (aluminum-silicon dioxide) beam, 1 × 1.5 μm2 in cross section. The beam fails at 220 μN. In both the experiments, the samples are designed, patterned, and cofabricated with the instruments. The microinstruments' small size, low thermal mass, vacuum compatibility, and built-in vibration isolation allow material characterization to be performed over a wide range of environmental conditions: high vacuum (electron microscopy and surface analysis), high humidity, high pressure, and high and low temperatures.
AB - We present two microinstruments for submicron scale material characterization. One of the instruments applies torsion on two single crystal silicon bars with square cross sections, 1 and 2.25 μm2, until fracture. The maximum shear stress prior to fracture is found to be 5.6 and 2.6 GPa, respectively. The second instrument applies tension on a composite (aluminum-silicon dioxide) beam, 1 × 1.5 μm2 in cross section. The beam fails at 220 μN. In both the experiments, the samples are designed, patterned, and cofabricated with the instruments. The microinstruments' small size, low thermal mass, vacuum compatibility, and built-in vibration isolation allow material characterization to be performed over a wide range of environmental conditions: high vacuum (electron microscopy and surface analysis), high humidity, high pressure, and high and low temperatures.
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U2 - 10.1557/JMR.1998.0454
DO - 10.1557/JMR.1998.0454
M3 - Article
AN - SCOPUS:0041009583
SN - 0884-2914
VL - 13
SP - 3353
EP - 3356
JO - Journal of Materials Research
JF - Journal of Materials Research
IS - 12
ER -