Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems

Thomas A Bassett (Inventor), Christopher A Apblett (Inventor), Amit V Desai (Inventor), Paul J A Kenis (Inventor), Joshua D Tice (Inventor)

Research output: Patent


An electrostatic actuator is provide that can include a fluidic line, a first electrode, and a second electrode such that a gate chamber portion of the fluidic line is sandwiched between the first electrode and the second electrode. The electrostatic actuator can also include a pressure-balancing channel in fluid communication with the gate chamber portion where the first electrode is sandwiched between the pressure-balancing channel and the gate chamber portion. A pneumatic valve system is provided which includes an electrostatic gate and a fluidic channel fluidly separate from a fluidic control line. A pneumatic valve portion of the fluidic control line can be positioned relative to a portion of the fluidic channel such that expansion of the pneumatic valve portion restricts fluid flow through the fluidic channel. Methods of using an electrostatic actuator and a pneumatic valve system are also provided.
Original languageEnglish (US)
U.S. patent number9447895
StatePublished - Sep 20 2016


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