@inproceedings{799e4e66ce384d038149b52c462d173e,
title = "Microfluidic optomechanical oscillators",
abstract = "We demonstrate a new class of fused silica MEMS that bridge between optomechanical and fluidic microsystems. Since fused silica is non-conductive and optically transparent, we employ {"}touch-less{"} excitation by means of optical electrostriction and radiation pressure to excite surface-acoustic-wave whispering gallery modes and wineglass modes in these devices. This is the first demonstration of mechanical vibration that interacts with fluids excited in a microstructure via optical forces. These mechanical oscillators operate over several orders-of-magnitude in frequency from 8.5 MHz-11 GHz.",
author = "G. Bahl and Kim, {K. H.} and W. Lee and J. Liu and X. Fan and T. Carmon",
note = "Publisher Copyright: {\textcopyright} 2012 TRF.; 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 ; Conference date: 03-06-2012 Through 07-06-2012",
year = "2012",
doi = "10.31438/trf.hh2012.26",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "96--97",
editor = "Mehran Mehregany and Monk, {David J.}",
booktitle = "2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012",
}