Microfluidic device fabrication utilizing virtual masks and photochemical etching

Lonna D. Edwards, Kaiyuan Wang, Chris Edwards, Xin Yu, Shailendra N. Srivastava, Gang Logan Liu, Lynford L. Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate using virtual masks to perform photochemical etching to facilitate microfluidic device fabrication. Applications of this cost-efficient alternative to conventional fabrication methods are expansive in many fields such as medical diagnostics.

Original languageEnglish (US)
Title of host publicationProceedings of Frontiers in Optics 2015, FIO 2015
PublisherOSA - The Optical Society
ISBN (Electronic)9781943580033
StatePublished - Jan 1 2015
EventFrontiers in Optics 2015, FIO 2015 - San Jose, United States
Duration: Oct 18 2015Oct 22 2015

Publication series

NameProceedings of Frontiers in Optics 2015, FIO 2015

Other

OtherFrontiers in Optics 2015, FIO 2015
CountryUnited States
CitySan Jose
Period10/18/1510/22/15

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Edwards, L. D., Wang, K., Edwards, C., Yu, X., Srivastava, S. N., Liu, G. L., & Goddard, L. L. (2015). Microfluidic device fabrication utilizing virtual masks and photochemical etching. In Proceedings of Frontiers in Optics 2015, FIO 2015 (Proceedings of Frontiers in Optics 2015, FIO 2015). OSA - The Optical Society.