Abstract
The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 83-85 |
| Number of pages | 3 |
| Journal | Science |
| Volume | 285 |
| Issue number | 5424 |
| DOIs | |
| State | Published - Jul 2 1999 |
| Externally published | Yes |
ASJC Scopus subject areas
- General
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