TY - JOUR
T1 - Microfabrication inside capillaries using multiphase laminar flow patterning
AU - Kenis, Paul J.A.
AU - Ismagilov, Rustem F.
AU - Whitesides, George M.
PY - 1999/7/2
Y1 - 1999/7/2
N2 - The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.
AB - The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.
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U2 - 10.1126/science.285.5424.83
DO - 10.1126/science.285.5424.83
M3 - Article
C2 - 10390366
AN - SCOPUS:0033516506
SN - 0036-8075
VL - 285
SP - 83
EP - 85
JO - Science
JF - Science
IS - 5424
ER -