Microfabricated suspensions for electrical connections on the tunable elastomer membrane

Paul J. Hung, Kihun Jeong, Gang L. Liu, Luke P. Lee

Research output: Contribution to journalArticlepeer-review


Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 μm in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane's center deflection ranged from 0 to 100 μm, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer.

Original languageEnglish (US)
Pages (from-to)6051-6053
Number of pages3
JournalApplied Physics Letters
Issue number24
StatePublished - Dec 13 2004
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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