Microfabricated pressure and shear stress sensors

Jonathan Engel (Inventor), Nannan I Chen (Inventor), Jack Chen (Inventor), Chang Liu (Inventor)

Research output: Patent


A microfabricated pressure sensor. The pressure sensor comprises a raised diaphragm disposed on a substrate. The diaphragm is configured to bend in response to an applied pressure difference. A strain gauge of a conductive material is coupled to a surface of the raised diaphragm and to at least one of the substrate and a piece rigidly connected to the substrate.
Original languageEnglish (US)
U.S. patent number7509869
Filing date7/20/07
StatePublished - Mar 31 2009


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