Abstract
A non-contact and non-destructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of films in single-layer and multilayer assemblies such as W/Si, Ti/Si, and Ti/SiO2/Si structures. Thicknesses are determined to within a few percent accuracy with a laboratory version of the measurement apparatus, using conventional large-frame lasers and optics, and in a commercial prototype using compact diode-pumped and diode lasers and optics which all fit onto a 1-ft×2-ft breadboard. ISTS and conventional measurements (profilometry, SEM, and 4-point resistance) are made on the same samples and the results are found to compare favorably.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 347-352 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 440 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1996 MRS Fall Symposium - Boston, MA, USA Duration: Dec 2 1996 → Dec 5 1996 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering