Abstract
Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.
| Original language | English (US) |
|---|---|
| Pages | 252 |
| Number of pages | 1 |
| State | Published - 2002 |
| Event | Conference on Lasers and Electro-Optics (CLEO 2002) - Long Beach, CA, United States Duration: May 19 2002 → May 24 2002 |
Other
| Other | Conference on Lasers and Electro-Optics (CLEO 2002) |
|---|---|
| Country/Territory | United States |
| City | Long Beach, CA |
| Period | 5/19/02 → 5/24/02 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering