Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications

Sung Jin Park, Jack Chen, Chang Liu, James Gary Eden

Research output: Contribution to conferencePaper

Abstract

Microdischarge device structures were designed to obtain cavity dimensions down to 10 μm. Microdrilling was performed through a metal/polymer/metal thin layered structure. Microelectromechanical system techniques were used for design and fabrication of microdischarge devices with a cavity width in 10 ∼ 50 μm diameter. The total emission from the cavity was measured to be 4.7 μW in a solid angle of 5 × 10-2.

Original languageEnglish (US)
Number of pages1
StatePublished - Jan 1 2002
EventConference on Lasers and Electro-Optics (CLEO 2002) - Long Beach, CA, United States
Duration: May 19 2002May 24 2002

Other

OtherConference on Lasers and Electro-Optics (CLEO 2002)
CountryUnited States
CityLong Beach, CA
Period5/19/025/24/02

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Park, S. J., Chen, J., Liu, C., & Eden, J. G. (2002). Microdischarge devices on the 10 ∼ 30 μm scale: Fabrication and applications. Paper presented at Conference on Lasers and Electro-Optics (CLEO 2002), Long Beach, CA, United States.