Microdischarge devices in silicon

Thomas A. DeTemple, James W. Frame, David J. Wheeler, J. Gary Eden

Research output: Contribution to journalConference articlepeer-review


The properties of microdischarge devices fabricated in silicon are reported. The emission spectra for a Ne penlight and a hollow cathode lamp were compared with that for a microdischarge. The ability to make the physical dimensions of the discharge comparable to the electron-neutral collisional mean free path offers the possibility for producing ballistic electrons at pressures higher than those conventional hollow cathode discharge. The potential applications of these devices on laser excitation and as resonance lamps are also discussed.

Original languageEnglish (US)
Number of pages1
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1997
EventProceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA
Duration: May 18 1997May 23 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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