Microdischarge devices and arrays having tapered microcavities

James Gary Eden (Inventor), Chang Liu (Inventor), Sung-Jin Park (Inventor), Jack Chen (Inventor)

Research output: Patent


A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
Original languageEnglish (US)
U.S. patent number7112918
Filing date1/15/02
StatePublished - Sep 26 2006


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