Microdischarge devices and arrays having tapered microcavities

James Gary Eden; Chang Liu; Sung-Jin Park; Jack Chen

Microdischarge devices and arrays having tapered microcavities

James Gary Eden (Inventor), Chang Liu (Inventor), Sung-Jin Park (Inventor), Jack Chen (Inventor)

Research output: Patent

Abstract

A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.

Original language	English (US)
U.S. patent number	7112918
Filing date	1/15/02
State	Published - Sep 26 2006

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title = "Microdischarge devices and arrays having tapered microcavities",

abstract = "A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.",

author = "Eden, {James Gary} and Chang Liu and Sung-Jin Park and Jack Chen",

note = "STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract Number F49620-00-1-0372 awarded by Air Force Office of Scientific Research (AFOSR). The Government has certain rights in the invention.; 7112918",

year = "2006",

month = sep,

day = "26",

language = "English (US)",

type = "Patent",

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AU - Eden, James Gary

AU - Liu, Chang

AU - Park, Sung-Jin

AU - Chen, Jack

N1 - STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract Number F49620-00-1-0372 awarded by Air Force Office of Scientific Research (AFOSR). The Government has certain rights in the invention.

PY - 2006/9/26

Y1 - 2006/9/26

N2 - A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.

AB - A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.

M3 - Patent

M1 - 7112918

Y2 - 2002/01/15

ER -

Microdischarge devices and arrays having tapered microcavities

Abstract

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