Abstract
Microdischarge devices are a new generation of micro-optical sources that have been fabricated in ceramics, semiconductors, and metal/dielectric/metal structures. Capable of producing photons from the infrared spectral region to the vacuum ultraviolet, these devices are well suited for integration with micro-optoelectronic, fluidic, and mechanical systems. Arrays as large as 13 × 13 of 200μm diameter cylindrical microdischarge devices have been fabricated in a multilayer structure in which each pixel is individually ballasted by an integrated resistor. Segmented, linear arrays having an active length of ∼1 cm have also been demonstrated.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 252-253 |
| Number of pages | 2 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5231 |
| State | Published - 2003 |
| Event | Ceramic Interconnect Technology: The Next Generation - Denver, CO, United States Duration: Apr 7 2003 → Apr 9 2003 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Applied Mathematics
- Electrical and Electronic Engineering
- Computer Science Applications