Microdischarge arrays: A new family of photonic devices (revised)

Sung Jin Park; Jack Chen; Clark J. Wagner; Nels P. Ostrom; Chang Liu; J. Gary Eden

doi:10.1109/2944.999194

Microdischarge arrays: A new family of photonic devices (revised)

Sung Jin Park, Jack Chen, Clark J. Wagner, Nels P. Ostrom, Chang Liu, J. Gary Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 μm) ² in emitting area (nanoliters in volume) and arrays as large as 30 × 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

Original language	English (US)
Pages (from-to)	387-394
Number of pages	8
Journal	IEEE Journal on Selected Topics in Quantum Electronics
Volume	8
Issue number	2
DOIs	https://doi.org/10.1109/2944.999194
State	Published - Mar 2002

Keywords

Discharges
Displays
Optical device integration
Optoelectronic devices

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

Online availability

10.1109/2944.999194

Library availability

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title = "Microdischarge arrays: A new family of photonic devices (revised)",

abstract = "The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 μm) 2 in emitting area (nanoliters in volume) and arrays as large as 30 × 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.",

keywords = "Discharges, Displays, Optical device integration, Optoelectronic devices",

author = "Park, {Sung Jin} and Jack Chen and Wagner, {Clark J.} and Ostrom, {Nels P.} and Chang Liu and Eden, {J. Gary}",

note = "Funding Information: Manuscript received August 8, 2001; revised December 7, 2001. This work was supported by the U.S. Air Force Office of Scientific Research under Grant F49620-99-1-0317, Grant F49620-99-1-0106, Grant F49620-98-1-0030, Grant F49620-00-1-0372, and Grant AF ETA 0043.",

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doi = "10.1109/2944.999194",

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pages = "387--394",

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AU - Park, Sung Jin

AU - Chen, Jack

AU - Wagner, Clark J.

AU - Ostrom, Nels P.

AU - Liu, Chang

AU - Eden, J. Gary

N1 - Funding Information: Manuscript received August 8, 2001; revised December 7, 2001. This work was supported by the U.S. Air Force Office of Scientific Research under Grant F49620-99-1-0317, Grant F49620-99-1-0106, Grant F49620-98-1-0030, Grant F49620-00-1-0372, and Grant AF ETA 0043.

PY - 2002/3

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N2 - The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 μm) 2 in emitting area (nanoliters in volume) and arrays as large as 30 × 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

AB - The optical and electrical characteristics of microdischarge devices and arrays fabricated in semiconductors and metal/polymer structures are described. Devices as small as (10 μm) 2 in emitting area (nanoliters in volume) and arrays as large as 30 × 30 have been demonstrated and operated at gas pressures up to and exceeding one atmosphere. This new generation of microoptical sources is capable of producing photons from the infrared to the vacuum ultraviolet and beyond and is well suited for integration with microoptoelectronic, fluidic, and mechanical systems.

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KW - Optical device integration

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Microdischarge arrays: A new family of photonic devices (revised)

Abstract

Keywords

ASJC Scopus subject areas

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