Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

Hadi Najar; Amir Heidari; Mei Lin Chan; Hseuh An Yang; Liwei Lin; David G. Cahill; David A. Horsley

doi:10.1063/1.4793234

Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

Hadi Najar, Amir Heidari, Mei Lin Chan, Hseuh An Yang, Liwei Lin, David G. Cahill, David A. Horsley

Research output: Contribution to journal › Article › peer-review

Abstract

Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m^-1 K^-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m^-1 K^-1 for the in-plane thermal conductivity of the diamond film.

Original language	English (US)
Article number	071901
Journal	Applied Physics Letters
Volume	102
Issue number	7
DOIs	https://doi.org/10.1063/1.4793234
State	Published - Feb 18 2013

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4793234

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title = "Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping",

abstract = "Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m-1 K-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m-1 K-1 for the in-plane thermal conductivity of the diamond film.",

author = "Hadi Najar and Amir Heidari and Chan, \{Mei Lin\} and Yang, \{Hseuh An\} and Liwei Lin and Cahill, \{David G.\} and Horsley, \{David A.\}",

note = "This work was supported by DARPA under Grant No. W31P4Q-11-1-0003. The authors thank Gerry Chandler and Maria Peralta at SP3 Diamond Technologies, Inc., for diamond film depositions and Burgess Johnson and John Reinke at Honeywell, Inc., for suggesting the use of TDTR for thermal conductivity measurements in diamond.",

year = "2013",

month = feb,

day = "18",

doi = "10.1063/1.4793234",

language = "English (US)",

volume = "102",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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T1 - Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

AU - Najar, Hadi

AU - Heidari, Amir

AU - Chan, Mei Lin

AU - Yang, Hseuh An

AU - Lin, Liwei

AU - Cahill, David G.

AU - Horsley, David A.

N1 - This work was supported by DARPA under Grant No. W31P4Q-11-1-0003. The authors thank Gerry Chandler and Maria Peralta at SP3 Diamond Technologies, Inc., for diamond film depositions and Burgess Johnson and John Reinke at Honeywell, Inc., for suggesting the use of TDTR for thermal conductivity measurements in diamond.

PY - 2013/2/18

Y1 - 2013/2/18

N2 - Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m-1 K-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m-1 K-1 for the in-plane thermal conductivity of the diamond film.

AB - Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m-1 K-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m-1 K-1 for the in-plane thermal conductivity of the diamond film.

UR - https://www.scopus.com/pages/publications/84874509892

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DO - 10.1063/1.4793234

M3 - Article

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SN - 0003-6951

VL - 102

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

M1 - 071901

ER -

Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

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