Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

Hadi Najar, Amir Heidari, Mei Lin Chan, Hseuh An Yang, Liwei Lin, David G. Cahill, David A. Horsley

Research output: Contribution to journalArticle

Abstract

Thin-film microcrystalline diamond micromechanical resonators with mechanical quality factor limited by thermoelastic dissipation in the diamond film are demonstrated. Surface micromachined double ended tuning fork resonators were fabricated from in-situ boron doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. Time-domain thermoreflectance measurements show thermal conductivity of 110 W m-1 K-1 for heat transport through the thickness of the diamond film. Measurement of the quality factor of resonators spanning a frequency range 0.5-10 MHz shows a maximum Q = 81 646 and demonstrates good agreement with quality factor limited by thermoelastic dissipation using 100 W m-1 K-1 for the in-plane thermal conductivity of the diamond film.

Original languageEnglish (US)
Article number071901
JournalApplied Physics Letters
Volume102
Issue number7
DOIs
StatePublished - Feb 18 2013

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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