The fabrication of lightweight and optically transparent arrays of microplasma devices having microcavities fabricated by a polymer-based replica molding process is reported. This process enables arrays of microcavity plasma devices and connecting channels with feature sizes as small as 20 m to be produced inexpensively and precisely over surface areas of at least tens of square centimeters. Devices having transparent electrodes and substrates (including glass and flexible plastic) have been operated successfully at rare gas pressures up to 700 torr. Individual microplasma pixels with cross-sectional dimensions of 200 × 200 μm2 and 50 ×50 μm2M, as well as plasma channels having widths of 20 and 150 m and aspect ratios (channel length : width) as large as 104 : 1, have been fabricated and tested. Representative voltage-current data for these structures and lifetime measurements for a 20 ×20 pixel array are presented.

Original languageEnglish (US)
Pages (from-to)1397-1402
Number of pages6
JournalJournal of Microelectromechanical Systems
Issue number6
StatePublished - Dec 2007


  • Flexible display
  • Microcavities
  • Microcavity plasmas
  • Optical arrays
  • Plasma devices
  • Replication process
  • Soft lithography
  • Transparent display

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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