Microcavity array plasma system for remote chemical processing at atmospheric pressure

Dae Sung Lee, Satoshi Hamaguchi, Osamu Sakai, Sung Jin Park, J. Gary Eden

Research output: Contribution to journalArticlepeer-review


A microplasma system designed for chemical processing at atmospheric pressure is fabricated and characterized with flowing He/O 2 gas mixtures. At the heart of this microcavity dielectric barrier discharge (MDBD) system are two arrays of half-ellipsoidal microcavities engraved by micropowder blasting into dielectric surfaces facing a flowing, low-temperature plasma. Experiments demonstrate that the ignition voltage is reduced, and the spatially averaged optical emission is doubled, for an MDBD flowing plasma array relative to an equivalent system having no microcavities. As an example of the potential of flowing atmospheric microplasma systems for chemical processing, the decomposition of methylene blue (as evidenced by decoloration at 650.2nm) is shown to proceed at a rate as much as a factor of two greater than that for a non-microcavity equivalent.

Original languageEnglish (US)
Article number222001
JournalJournal of Physics D: Applied Physics
Issue number22
StatePublished - Jun 6 2012

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films


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