Microcavity and Microchannel Plasmas: General Characteristics and Emerging Applications

J. Gary Eden, Sung Jin Park

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Confining low temperature plasma in cavities or channels having mesoscopic dimensions (1–1000 μ m) has opened a new avenue for plasma science and its applications. This chapter provides a brief overview of the current understanding of microplasma physics, and discusses the distinctives of microcavity plasmas with respect to conventional (macroscopic) plasmas. Notable properties of microcavity plasmas include their peak and time-averaged electron densities as well as power dissipated per unit volume. Applications of arrays of microcavity and microchannel plasmas described here include plasma printing, plasmachemical generation of commercially-valuable products such as ozone, and UHF receiving antennas comprising parallel microchannel plasmas.

Original languageEnglish (US)
Title of host publicationSpringer Series on Atomic, Optical, and Plasma Physics
PublisherSpringer
Pages373-398
Number of pages26
DOIs
StatePublished - 2014
Externally publishedYes

Publication series

NameSpringer Series on Atomic, Optical, and Plasma Physics
Volume82
ISSN (Print)1615-5653
ISSN (Electronic)2197-6791

Keywords

  • Cavity Dimension
  • Cavity Wall
  • Dielectric Barrier Discharge
  • Electric Field Strength
  • Plasma Device

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics
  • Radiation

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