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Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer
Craig Prater (Inventor), Kevin Kjoller (Inventor), William P King (Inventor), Jonathan R Felts (Inventor)
- University of Illinois Urbana-Champaign
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Patent