Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

Chris Pettit; Bongwon Jeong; Hohyun Keum; Joohyung Lee; Jungkyu Kim; Seok Kim; Donald Michael McFarland; Lawreence A. Bergman; Alexander F. Vakakis; Hanna Cho

doi:10.1109/MEMSYS.2015.7051067

Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

Chris Pettit, Bongwon Jeong, Hohyun Keum, Joohyung Lee, Jungkyu Kim, Seok Kim, Donald Michael McFarland, Lawreence A. Bergman, Alexander F. Vakakis, Hanna Cho

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report a new design concept of micromechanical cantilever system incorporating the 1/3 internal resonance during dynamic mode operation of atomic force microscopy (AFM). The passive amplification of third harmonic triggered through the mechanism of 1/3 internal resonance enables AFM to utilize multiple harmonics in an air environment. Detailed theoretical and experimental studies of the proposed design demonstrate that the multi-harmonic AFM (MH-AFM) is capable of simultaneous topography imaging and compositional mapping with more than 10-fold enhanced sensitivity.

Original language	English (US)
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	752-755
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051067
State	Published - Feb 26 2015
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: Jan 18 2015 → Jan 22 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	1/18/15 → 1/22/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2015.7051067

Library availability

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Pettit, C., Jeong, B., Keum, H., Lee, J., Kim, J., Kim, S., McFarland, D. M., Bergman, L. A., Vakakis, A. F., & Cho, H. (2015). Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 752-755). Article 7051067 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051067

Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy. / Pettit, Chris; Jeong, Bongwon; Keum, Hohyun et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 752-755 7051067 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Pettit, C, Jeong, B, Keum, H, Lee, J, Kim, J, Kim, S, McFarland, DM, Bergman, LA, Vakakis, AF & Cho, H 2015, Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051067, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 752-755, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 1/18/15. https://doi.org/10.1109/MEMSYS.2015.7051067

Pettit C, Jeong B, Keum H, Lee J, Kim J, Kim S et al. Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 752-755. 7051067. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051067

Pettit, Chris ; Jeong, Bongwon ; Keum, Hohyun et al. / Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 752-755 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

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