Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

Chris Pettit, Bongwon Jeong, Hohyun Keum, Joohyung Lee, Jungkyu Kim, Seok Kim, Donald Michael McFarland, Lawrence Bergman, Alexander F Vakakis, Hanna Cho

Research output: Contribution to journalConference article

Abstract

We report a new design concept of micromechanical cantilever system incorporating the 1/3 internal resonance during dynamic mode operation of atomic force microscopy (AFM). The passive amplification of third harmonic triggered through the mechanism of 1/3 internal resonance enables AFM to utilize multiple harmonics in an air environment. Detailed theoretical and experimental studies of the proposed design demonstrate that the multi-harmonic AFM (MH-AFM) is capable of simultaneous topography imaging and compositional mapping with more than 10-fold enhanced sensitivity.

Original languageEnglish (US)
Article number7051067
Pages (from-to)752-755
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
StatePublished - Feb 26 2015
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: Jan 18 2015Jan 22 2015

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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