Abstract

This paper describes the design, fabrication, and characterization of microcantilever hotplates having both a resistive heater and temperature-compensated piezoresistive strain gauges. The heater was defined near the cantilever free end and the piezoresistive strain gauges were integrated near the clamped base. To realize temperature compensation, a pair of identical piezoresistors was defined in close proximity. One piezoresistor was aligned to the 〈1 1 0〉 crystal direction where the piezoresistive coefficient is maximized and the other one was aligned to the 〈1 0 0〉 crystal direction where the piezoresistive coefficient is nearly zero. The fabricated devices exhibit excellent temperature compensation, with a 20× reduction in temperature sensitivity. The deflection sensitivity shifted only 10% for heating to 200 °C and cantilever deflection ∼10 μm. This work enables cantilever strain sensors that could measure temperature-dependant phenomena.

Original languageEnglish (US)
Pages (from-to)181-190
Number of pages10
JournalSensors and Actuators, A: Physical
Volume143
Issue number2
DOIs
StatePublished - May 16 2008

Keywords

  • Heater
  • Hotplate
  • Microcantilever
  • Piezoresistor
  • Temperature compensation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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