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Microcantilever heater-thermometer with integrated temperature-compensated strain sensor
William P King (Inventor), Fabian T Goericke (Inventor), Jungchul Lee (Inventor)
- University of Illinois Urbana-Champaign
- Mechanical Science and Engineering
- Grainger College of Engineering
- Materials Science and Engineering
- Materials Research Lab
- Information Trust Institute
- Micro and Nanotechnology Lab
- Electrical and Computer Engineering
- Beckman Institute for Advanced Science and Technology
- Biomedical and Translational Sciences
Research output: Patent