Abstract
The recently developed transfer printing-based microassembly called micro-LEGO has been exploited to enable microelectromechanical systems (MEMS) applications which are difficult to achieve using conventional microfabrication. Micro-LEGO involves transfer printing and thermal processing of prefabricated micro/nanoscale materials to assemble structures and devices in a 3D manner without requiring any wet or vacuum processes. Therefore, it complements existing microfabrication and other micro-assembly methods. In this paper, the process components of micro-LEGO, including transfer printing with polymer stamps, material preparation and joining, are summarized. Moreover, recent progress of micro-LEGO within MEMS applications are reviewed by investigating several example devices which are partially or fully assembled via micro-LEGO.
Original language | English (US) |
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Article number | 267 |
Journal | Micromachines |
Volume | 10 |
Issue number | 4 |
DOIs | |
State | Published - Apr 21 2019 |
Keywords
- microassembly
- MEMS
- transfer printing
- elastomer stamp
- shape memory polymer
- Transfer printing
- Shape memory polymer
- Elastomer stamp
- Microassembly
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering