Arrays of microplasma devices, fabricated in a photodefinable glass and driven ac or dc by interdigitated electrodes outside the microcavities, have been fabricated and characterized. Operating in the abnormal glow mode for Ne pressures between 200 and 900 Torr and having cross-sectional dimensions of 75-100 μm, the devices are well behaved and arrays as large as 25×25 pixels have been tested to date. Focused on ease of assembly and minimizing cost, the design of these arrays makes then attractive for structures having emitting areas of hundreds of cm2.
|Original language||English (US)|
|Number of pages||3|
|Journal||Digest of Technical Papers - SID International Symposium|
|State||Published - 2005|
|Event||2005 SID International Symposium - Boston, MA, United States|
Duration: May 25 2005 → May 27 2005
ASJC Scopus subject areas