Micro-cantilever metrology tool for flow characterization of liquid and micro/nanojets

Jungchul Lee, Kianoush Naeli, Hanif Hunter, John Berg, Tanya Wright, Christophe Courcimault, Nisarga Naik, Mark Allen, Oliver Brand, Ari Glezer, William King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages95-100
Number of pages6
DOIs
StatePublished - Dec 1 2005
Externally publishedYes
Event2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume7 MEMS
ISSN (Print)1096-665X

Other

Other2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

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Keywords

  • Anemometry
  • Atomic Force Microscope
  • Heated cantilever
  • MEMS
  • Micro/nanojets
  • Piezoresistive cantilever

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Lee, J., Naeli, K., Hunter, H., Berg, J., Wright, T., Courcimault, C., Naik, N., Allen, M., Brand, O., Glezer, A., & King, W. (2005). Micro-cantilever metrology tool for flow characterization of liquid and micro/nanojets. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (pp. 95-100). (American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS; Vol. 7 MEMS). https://doi.org/10.1115/IMECE2005-81732