TY - GEN
T1 - Micro-cantilever metrology tool for flow characterization of liquid and micro/nanojets
AU - Lee, Jungchul
AU - Naeli, Kianoush
AU - Hunter, Hanif
AU - Berg, John
AU - Wright, Tanya
AU - Courcimault, Christophe
AU - Naik, Nisarga
AU - Allen, Mark
AU - Brand, Oliver
AU - Glezer, Ari
AU - King, William
PY - 2005
Y1 - 2005
N2 - This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.
AB - This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.
KW - Anemometry
KW - Atomic Force Microscope
KW - Heated cantilever
KW - MEMS
KW - Micro/nanojets
KW - Piezoresistive cantilever
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UR - http://www.scopus.com/inward/citedby.url?scp=33645995423&partnerID=8YFLogxK
U2 - 10.1115/IMECE2005-81732
DO - 10.1115/IMECE2005-81732
M3 - Conference contribution
AN - SCOPUS:33645995423
SN - 079184224X
SN - 9780791842249
T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
SP - 95
EP - 100
BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -