Abstract
A heater design, used in a micro-calorimetric sensor, has been optimized for temperature uniformity in order to increase the sensitivity and reliability of detection of trace amounts of explosives. In this abstract the design, fabrication and characterization is described. The performance of the novel heater design is characterized by measuring the temperature coefficient of resistivity (TCR) values and by mapping the temperature distribution using Raman spectroscopy. The new heater design is seen to have increased the temperature uniformity by a factor of 2.3.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 696-698 |
| Number of pages | 3 |
| Journal | Microelectronic Engineering |
| Volume | 87 |
| Issue number | 5-8 |
| DOIs | |
| State | Published - May 2010 |
Keywords
- Calorimetry
- Explosive detection
- Micro-heater
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering