Methods for forming a nanowire and apparatus thereof

Eric Pop (Inventor), Feng Xiong (Inventor), Myung-Ho Bae (Inventor)

Research output: Patent

Abstract

A system that incorporates teachings of the subject disclosure may include, for example, a method for depositing a first material that substantially covers a nanoheater, applying a signal to the nanoheater to remove a first portion of the first material covering the nanoheater to form a trench aligned with the nanoheater, depositing a second material in the trench, and removing a second portion of the first material and a portion of the second material to form a nanowire comprising a remaining portion of the second material covering the nanoheater along the trench. Additional embodiments are disclosed.
Original languageEnglish (US)
U.S. patent number9412442
Filing date4/27/12
StatePublished - Aug 9 2016

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