Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same

Keyphrases

• Complex Microstructure 100%
• Cross-sectional Geometry 66%
• Device Components 33%
• Dielectric Structure 33%
• Electronic Components 100%
• Electronic Devices 100%
• Electronic Structure 33%
• Integrated Device 33%
• Material Strategy 33%
• Metal Structure 33%
• Microfabrication 33%
• Nanofabrication 33%
• Nanoscale Electronics 100%
• Nanoscale Structure 100%
• Patterning Strategies 33%
• Photolithographic 33%
• Photoresist 33%
• Pixel Patterning 33%
• Processed Material 33%
• Processing Methods 100%
• Processing Stages 33%
• Processing Strategies 33%
• Semiconductor Structures 33%
• Step Method 33%
• Step Strategy 33%
• Strategy System 33%
• Sub-pixel 33%
• T Gate 66%
• Thin Film Deposition 33%
• Γ-gate 33%

Engineering

• Component Device 50%
• Dielectrics 50%
• Infrastructure 50%
• Microfabrication 50%
• Microscale 50%
• Microstructure 100%
• Nanofabrication Process 50%
• Nanomaterial 100%
• Nanoscale 50%
• Optoelectronic Device 50%
• Photoresist 50%
• Processing Method 100%
• Processing Step 50%
• Processing Strategy 50%
• Semiconductor Structure 50%
• Thin Films 50%

Material Science

• Dielectric Material 100%
• Electronic Structure 100%
• Microfabrication 100%
• Semiconductor Structure 100%
• Thin Film Deposition 100%