Method of manufacturing a microelectromechanical switch

Shyh-Chiang Shen (Inventor), Milton Feng (Inventor)

Research output: Patent

Abstract

A method for controlling the flow of signals by selectively switching signals to ground and allowing signals to pass through a signal line based a position of a conductive pad. The method includes the steps of forming a conductive coplanar signal line and ground planes, depositing a first release layer over the signal line and ground planes, and forming a conductive pad spanning portions of both the signal line and ground planes on the first release layer. The method also includes the steps of forming a second release layer over the conductive pad, forming two sets of holes through the first and second release layers down to the ground planes with the two sets of holes being formed around portions of the conductive path, and forming a dielectric suspension in a first set of the two sets of holes. The method further includes the steps of forming a metal contact on the dielectric suspension, forming a metal bracket in the second set of the two sets of holes, and removing the first and second release layers to release the conductive pad.
Original languageEnglish (US)
U.S. patent number6678943
Filing date10/10/00
StatePublished - Jan 20 2004

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