Method of and magnet assembly for high power pulsed magnetron sputtering

Ivan A Shchelkanov (Inventor), Priya Raman (Inventor), David N Ruzic (Inventor)

Research output: Patent

Abstract

A magnet assembly for use in high power pulsed magnetron sputtering comprises a configuration of magnets having a magnetic field topology comprising magnetic field components Bx, By and Bz. A tangential magnetic field B// distribution on an x-y plane above the configuration of magnets comprising an outer continuous ring and one or more inner continuous rings contained in the outer continuous ring. A total magnetic field Btot distribution on an x-z plane intersecting the configuration of magnets comprises an outer closed loop and one or more inner closed loops contained in the outer closed loop, where, as a function of x, a tangential magnetic field B// alternates between (a) high field values greater than 200 G and high gradients in the z-direction of at least 1000 G/in, and (b) low field values of less than 50 G and low gradients in the z-direction of at most 250 G/in.
Original languageEnglish (US)
U.S. patent number10332731
StatePublished - Jun 25 2019

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