Method and apparatus for exciting a microdischarge

James Gary Eden (Inventor), Clark J. Wagner (Inventor), Sung-Jin Park (Inventor)

Research output: Patent

Abstract

A discharge device has a diode with a depletion region, a channel extending through a surface of the diode, and a gas within the channel. The gas is excited and a discharge formed by reverse biasing the diode and establishing an electric field in the depletion region of the diode.
Original languageEnglish (US)
U.S. patent number6815891
Filing date10/26/01
StatePublished - Nov 9 2004

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