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Method and apparatus analyzing a target material
Jean-Pierre Leburton
(Inventor)
Electrical and Computer Engineering
Physics
Coordinated Science Lab
Micro and Nanotechnology Lab
Beckman Institute for Advanced Science and Technology
Research output
:
Patent
Overview
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Keyphrases
Via Hole
100%
Charge Concentration
50%
Voltage Potential
50%
Electrical Properties
25%
Atomic Layers
25%
Degrees of Freedom
25%
Engineering
Target Material
100%
Atomic Layer
50%
Degree of Freedom
50%