METAL-ORGANIC LOW PRESSURE CHEMICAL VAPOR DEPOSITON (MOLPCVD) OF Al.

M. L. Green, R. A. Levy, R. G. Nuzzo, E. Coleman

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	655-656
Number of pages	2
Journal	Electrochemical Society Extended Abstracts
Volume	83-1
State	Published - 1983
Externally published	Yes

ASJC Scopus subject areas

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title = "METAL-ORGANIC LOW PRESSURE CHEMICAL VAPOR DEPOSITON (MOLPCVD) OF Al.",

author = "Green, {M. L.} and Levy, {R. A.} and Nuzzo, {R. G.} and E. Coleman",

year = "1983",

language = "English (US)",

volume = "83-1",

pages = "655--656",

journal = "Electrochemical Society Extended Abstracts",

issn = "0160-4619",

}

TY - JOUR

T1 - METAL-ORGANIC LOW PRESSURE CHEMICAL VAPOR DEPOSITON (MOLPCVD) OF Al.

AU - Green, M. L.

AU - Levy, R. A.

AU - Nuzzo, R. G.

AU - Coleman, E.

PY - 1983

Y1 - 1983

UR - http://www.scopus.com/inward/record.url?scp=0020981149&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0020981149&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0020981149

SN - 0160-4619

VL - 83-1

SP - 655

EP - 656

JO - Electrochemical Society Extended Abstracts

JF - Electrochemical Society Extended Abstracts

ER -