METAL-ORGANIC LOW PRESSURE CHEMICAL VAPOR DEPOSITON (MOLPCVD) OF Al.

M. L. Green, R. A. Levy, R. G. Nuzzo, E. Coleman

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish (US)
Pages (from-to)655-656
Number of pages2
JournalElectrochemical Society Extended Abstracts
Volume83-1
StatePublished - Dec 1 1983
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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